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2024
2023
2. Coiled-Coil-Based Biofunctionalization of 100 nm Gold Nanoparticles with the Trastuzumab Antibody for the Detection of HER2-Positive Cancer Cells, Langmuir, 2023.
2022
2021
2020
2019
2018
2017
2016
2015
2014
Papers
Proceedings
3. Meunier M, A new plasmonics enhanced ultrafast laser multi-nanoscalpel, Proc. of SPIE, 2014.
2013
2012
2011
Papers
Proceedings
Baumgart J, Humbert L, St.-Louis Lalonde B, Lebrun J-J, Meunier M, Plasmonic enhanced fs-laser optoporation of human melanoma cells, Proceeding of SPIE, 2011.
2010
2009
Excimer Laser Micromachining of LiNbO3 for Optical and Microwave Applications, Ebrahim Mortazy, Ke Wu and Michel Meunier, Journal of Laser Micro/Nanoengineering Vol. 4, No. 2, 2009
Miniaturization limits for single-chamber micro-solid oxide fuel cells with coplanar electrodes, Melanie Kuhn, Teko W. Napporn, Michel Meunier, Srikar Vengallatore, Daniel Therriault, Journal of Power Sources, 194 (2009), 941-949
Modeling of three-dimensional diffusible resistors with the one-dimensional tube multiplexing method, Jean-Numa Gillet, Jean-Yves Degorce and Michel Meunier, Semiconductor Science and Technology, September 2009 Volume: 24 Start Page: 095010
Fabrication and testing of coplanar single-chamber micro solid oxide fuel cells with geometrically complex electrodes, M. Kuhn, T. Napporn, M. Meunier, D. Therriault and S. Vengallatore, Journal of Power Sources 177 (2008), 148-153.
Temperature and performance variations along single chamber solid oxide fuel cells, Bertrand Morel, Réal Roberge, Sylvio Savoie, Teko W. Napporn and Michel Meunier, Journal of Power Sources.
Silicon nanoparticles produced by femtosecond laser ablation in water as novel contamination-free photosensitizers, David Rioux, Marie Laferrière, Alexandre Douplik, Duoaud Sha, Lothar Lilge, Andrei V. Kabashin, Michel M. Meunier, Journal of Biomedical Optics.
Mechanical modulation method for ultrasensitive phase measurements in photonics biosensing, Patskovsky, S; Maisonneuve, M; Meunier, M; Kabashin, A V, Optics Express, Vol. 16 Issue 26, pp.21305-21314 (2008).
Designing efficient zero calibration point for phase-sensitive surface plasmon resonance biosensing, Patskovsky, S; Vallieres, M; Maisonneuve, M; Song, In-Hyouk; Meunier, M; Kabashin, A V, Optics Express, Vol. 17 Issue 4, pp.2255-2263 (2009)
2008
2007
Phase-sensitive silicon-based total internal reflection sensor
S. Patskovsky, M. Meunier, and A. V. Kabashin
Optics express 12523, Vol. 15, No. 19, (2007)
Synthesis of efficient ZnO-based random lasing medium using laser-induced air breakdown processing
A.V.Kabashin, A. Trudeau, M. Meunier and W. Marine
Applied physics letters 91, 201101 (2007)
Proprieties of nanostructured Ge produced by laser-induced air breakdown processing
A.V.Kabashin, F. Magny and M. Meunier
Journal of applied physics 101, 054311 (2007)
Coplanar electrodes design for a single-chamber SOFC
X. Jacques-Bédard, T. W. Napporn,.R. Roberge, and M. Meunier
Journal of The Electrochemical Society, 1154 (3) B305-B309 (2007)
An experimental evaluation of the temperature gradient in solid oxide
B. Morel, R. Roberge, S. Savoie, and M. Meunier
Electrochemical and Solid-State Letters 10 (2) , B31-B33 (2007)
Two-step femtosecond laser ablation-based method for the synthesis of stable and ultra-pure gold nanoparticles in water
S. Besner, A. V. Kabashin, and M. Meunier
Applied Physics. A 88, 269–272 (2007)
Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications
I-H Song, Y-A Peter and M. Meunier
Journal of micromechanics and microengineering 17 (2007) 1593–1597
2006
PAPERS
Characterisation of hign refractive index semiconductor films by surface plasmon resonance
S. Patskovsky, A. V. Kabashin, and M. Meunier
Applied Optics, 45, 6640-6645 (2006)
Arrays of periodic submicron conductive links in Si covered by SiO2 formed by polarized laser irradiation
Yougui Liao and Michel Meunier
Semicond. Sci. Technol. 21 (2006) 860–865
Ablation of molecular solids under nanosecond laser pulses : The role of inertial confinement
Danny Perez, Laurent J. Lewis, Patrick Lorazo and Michel Meunier
Applied Physics Letters 89, 141907 (2006)
Laser ablation-based synthesis of functionalized colloidal nanomaterials in biocompatible solutions
Andrei V. Kabashin, Michel Meunier
Journal of Photochemistry and Photobiology A: Chemistry 182 (2006) 330–334
Three-dimensional crystallization inside photosensitive glasses by focused femtosecond laser,
B. Fisette, F. Busque, J.-Y. Degorce, and M. Meunier,
Applied Physics Letters 88, 091104 (2006)
Laser Induced Formation of Periodic Nanostructures in Silicon Covered by SiO2,
Y. Liao, J.-Y. Degorce and M. Meunier,
Applied Physics A, 82, 679-682 (2006)
Fragmentation of colloidal nanoparticles by femtosecond laser-induced supercontinuum generation
S. Besner, A. V. Kabashin, and M. Meunier
Applied Physics Letters 89, 233122 (2006)
Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation,
Patrick Lorazo, Laurent J. Lewis, and Michel Meunier,
Physical Review B 73, 134108 (2006)
Coulomb explosion induced by intense ultrashort laser pulses in two-dimensional clusters,
Vincent Mijoule, Laurent J. Lewis, and Michel Meunier,
Physical Review A 73, 033203 (2006)
2D Dopant Determination in Laser-Diffused Si Resistors Using Dopant-Selective Etching,
Y. Liao, J.-Y. Degorce, J. Belisle and M. Meunier,
Journal of the Electrochemical Society, 153(1), G16-G22 (2006)
Three-dimensional microfabrication inside photosensitive glasses by femtosecond laser,
B. Fisette and M. Meunier,
Journal of Laser Micro/Nanoengineering, Vol. 1, No. 1 (2006)
Performance and ageing of an anode-supported SOFC operated in single-chamber conditions,
X. Jacques-Bédard, T.W. Napporn, R. Roberge and M. Meunier,
Journal of Power Sources, 153, 108–113 (2006)
PROCEEDINGS
Smart technologies for structural health monitoring of aerospace structures
P. Masson, P. Micheau, Y. Pasco1, M. Thomas, V. Brailovski, M. Meunier, Y.-A. Peter,
I.-H. Song, D. Mateescu, A. Misra, N. Mrad, J. Pinsonnault, A. Cambron.
Cansmart 2006 International Workshop, 12 - 13 October 2006, Toronto, Ontario, Canada
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2005
PAPERS
General model and segregation coefficient measurement for ultra-shallow doping by excimer laser annealing,
J-N. Gillet, J-Y. Degorce and M. Meunier,
Appl. Phys. Lett. 86, 222104 (2005)
Photoluminescence of highly porous nanostructured Si-based thin films deposited by pulsed laser ablation,
D.-Q. Yang, V. Ethier, E. Sacher, and M. Meunier,
-Journal of APPLIED PHYSICS, 98, 024310 (2005)
The surface modification of nanoporous SiOx thin films with a monofunctional organosilane,
D.-Q. Yang, M. Meunier and E. Sacher,
Appl. Surf. Sci., 252, 1197-1206 (2005)
Photoacoustic Fourier transform infrared spectroscopy of nanoporous SiOx/Si thin films with varying porosities,
D.-Q. Tang, M. Meunier and E. Sacher,
J. Appl. Phys., 98, 114310 (2005)
Performance and ageing of an anode-supported SOFC operated in single-chamber conditions,
X. Jacques-Bédard, T. Napporn, R. Roberge and M. Meunier,
Journal of Power Sources, 17 May 2005
General Equation for Size Nanocharacterization of the Core-Shell Nanoparticles by X-ray Photoelectron Spectroscopy,
J.-N. Gillet and M. Meunier,
J. Phys. Chem B, 109, 8733-8737 (2005)
The Characterization of the Surface Modification of Nanoporous SiOx Thin films with a Monofunctional Organosilane,
D.-Q Yang, M. Meunier and E. Sacher,
Applied Surface Science,22 March 2005
Influence of ambient medium on femtosecond laser processing of silicon,
S. Besner, J-Y. Degorce, A.V. Kabashin, M. Meunier,
Applied Surface Science, 5 March 2005
Near-infrared surface plasmon resonance sensing on a silicon platform with nanoparticle-based signal enhancement,
S. Patskovsky, A. V. Kabashin and M. Meunier,
Optical materials, 27, 1093-1096 (2005)
Room Temperature Oxidation Kinetics of Si Nanoparticles, as Determined by X-ray Photoelectron Spectroscopy,
D.-Q Yang, J-N. Gillet, M. Meunier and E. Sacher,
Journal of Applied Physics 97, 024303, (2005)
A Mediatorless Biosensor for Putrescine using Multiwalled Carbon Nanotubes,
J-F Rochette, J. H. T. Luong, E. Sacher and M. Meunier,
Analytical Biochemistry, 336, 305-311 (2005)
Femtosecond laser ablation of gold in water: influence of the laser-produced plasma on the nanoparticle size distribution,
J-P. Sylvestre, A.V. Kabashin, E. Sacher and M. Meunier,
Applied Physics A. 80, 753-758 (2005)
Three-dimensional transient temperature field model for laser annealing,
J-Y. Degorce, J-N. Gillet, F. Magny and M. Meunier,
J. Applied Physics, 97, 033520 (2005)
The Creation of Au Nanoscale Surface Patterns by the Low Energy Ar+ Beam Irradiation of Au Clusters Evaporated Onto a SiO2/Si Surface,
D.-Q. Yang, E. Sacher and M. Meunier,
Appl. Phys. A 80, 575–579 (2005)
PROCEEDINGS
Sensing properties of surface plasmon resonance in different multi-layer Si-based structures,
-Sergiy Patskovsky, Andrei V. Kabashin, Michel Meunier and John H.T. Luong,
SPIE Proceedings, Photonics North (2004), published 2005, 5577-60
Formation of densely populated SiOx microtree-like structures on the Si (100) surface, using excimer laser irradiation in air,
D.-Q. Yang, E. Sacher and M. Meunier,
SPIE- Proceedings Photonics North (2004) published 2005, 5578-88
Femtosecond laser three-dimensional microstructuring inside photosensitive glasses,
B. Fisette and M. Meunier,
SPIE- Proceedings Photonics North (2004) published 2005, 5578-93
Surface modifications during femtosecond laser ablation in vacuum, air and water,
S. Besner, J.-Y. Degorce, A. V. Kabashin, M. Meunier,
SPIE- Proceedings Photonics North (2004) published 2005, 5578-73
Single-chamber SOFC comparing dry and humidified conditions,
Teko W. Napporn, S. Savoie, R. Roberge, X. Jacques-Bédard and M. Meunier,
-Proc. SOFC IX Québec (2005)
Characterization of laser-induced photoexcitation effect on a surrounding CMOS ring oscillator,
Guillaume Wild, Yvon Savaria and Michel Meunier,
Proceedings IEEE (2005)
Laser ablation-based nanofabrication in aqueous solutions,
Andrei V. Kabashin and Michel Meunier,
Proceedings of the MRS, (2005)
Design Methods for CMOS Low-Current Finely Tunable Voltage References Covering a Wide Output Range,
Simon Rioux, Alain Lacourse, Mathieu Ducharme, Yves Gagnon, Yvon Savaria and Michel Meunier,
Proceedings IEEE (2005)
2004
PAPERS
D.-Q. Yang, A. V. Kabachin, V.-G. Pilon-Marien, E. Sacher and M. Meunier,
Journal of Applied Physics, 95, 5722-5728 (2004)
Fabrication and characterization of flexible non-planar microelectrode array circuits for use in arthroscopic diagnosis of cartilage diseases,
E. Quenneville, J.-S. Binette, M. Garon, A. Légaré, M. Meunier and M.D. Buschmann,
IEEE-Transactions on Biomedical Engineering, 51, 2164-2173 (2004)
The Early Stages of Silicon Surface Damage Induced by Pulsed CO2 Laser Radiation: An AFM Study,
D.-Q. Yang, E. Sacher and M. Meunier,
Appl. Surface Science 222, 365-373 (2004)
Near-Infrared Surface Plasmon Resonance Sensor on a Silicon Platform,
S. Patskovsky, A. V. Kabashin, M. Meunier and J. H.T. Luong,
Sensors and Actuators B : Chemical 97, 409-414 (2004)
Stabilization and Size Control of Gold Nanoparticles during Laser Ablation in Aqueous Cyclodextrins,
Jean-Philippe Sylvestre, Andrei V. Kabashin, Edward Sacher, Michel Meunier and John H.T. Luong,
Journal of the American Chemical Society, 126, 7176-7177 (2004)
Operating Conditions of a Single-Chamber SOFC,
Teko W. Napporn, Xavier Jacques-Bédard, François Morin and Michel Meunier,
Journal of the Electrochemical Society, 12, A2088-A2094 (2004)
Analytical Solutions of a Growth Model for a Melt Region Induced by a Focused Laser Beam,
Antoine Saucier, Jean-Yves Degorce and Michel Meunier,
Society for Industrial and Applied Mathematics, SIAM J. Appl. Math., 64 no.6, 2076-2095 (2004)
Analytical Model for a Current Density Versus Voltage Relation in n+ v n+ devices,
M. Ducharme, J.-S. Bernier and Michel Meunier,
Semiconductor Science and Technology, 19, L103-L105 (2004)
Surface Chemistry of Gold Nanoparticles Produced by Laser Ablation in Aqueous Media,
Jean-Philippe Sylvestre, Suzie Poulin, Andrei V. Kabashin, Edward Sacher, Michel Meunier and John H.T. Luong,
J. Phys. Chem. B, 108, 16864-16869 (2004)
Excimer Laser Manipulation and Patterning of Gold Nanoparticles on SiO2/Si,
D.-Q. Yang, M. Meunier and E. Sacher,
Journal of Applied Physics, 95, 5023-26 (2004)
Evaluation of the actual working temperature of a single-chamber solid oxide fuel cell,
T. W. Napporn, F. Morin and M. Meunier,
Electrochemical Solid State Letters. 7, A60-A62 (2004)
PROCEEDINGS
Surface Plasmon Resonance sensing in Si-based coupling schemes,
S. Patskovsky, A. Kabashin, M. Meunier and J.H.T. Luong,
Proc. SPIE 5327, 102-105 (2004)
On efficiency of surface plasmon resonance-based absorption sensing with different absorbent materials,
S. Patskovsky, A. V. Kabashin and M. Meunier,
Proc. SPIE, vol 5327, 102-107 (2004)
Adhesion Decrease of Au Nanoparticles to the O2 Plasma-Oxidized Silicon Surface on KrF Excimer Laser-Induced Coalescence,
D.-Q. Yang, M. Meunier and E. Sacher,
Proc. 27th Annu. Mtg Adhesion Society, Adhesion Society, Blacksburg, VA, 2004, pp. 123-125
Thermodynamics of absorbing solids during short-pulse laser ablation,
Patrick Larazo, Danny Perez, Laurent J. Lewis, Michel Meunier,
Proceeding of the SPIE, High Power Laser Ablation (2004)
Modeling the impact of manufacturing imperfections on photonic crystal device performance: design of perturbation-tolerant PBG components,
M. Skorobogatiy, S. A. Jacobs, S. G. Johnson, M. Meunier, and Y. Fink,
Proceeding of the SPIE (2004)
Keywords : Photonic crystals, microstructured fibers, perturbation theory, coupled mode theory, imperfections
Nanoparticle size reduction during laser ablation in aqueous solutions of cyclodextrins,
J.-P. Sylvestre, A. V. Kabashin, E. Sacher, M. Meunier and J. H.T. Luong,
Proceeding of the SPIE, (2004)
Keywords : Femtosecond laser ablation in liquids, gold nanoparticles, cyclodextrins
Laser assisted methods for nanofabrication
A. Kabashin and M. Meunier,
Proceeding of the SPIE (2004)
Keywords : Laser-assisted nanofabrication, nanoparticles, nanostructures, laser ablation
Modeling the laser-induced diffusible resistance process,
M. Meunier , J.-Y. Degorce, J.-N. Gillet and F. Magny,
Proceeding of the SPIE (2004)
Keywords : Laser trimming, laser tuned microdevices, laser-induced diffusible resistance, micrielectronics, highly accurate resistance, laser process modeling, semoconductor modeling
2003
PAPERS
Short pulse laser ablation of solids : from phase explosion to fragmentation,
P. Lorazo, L. Lewis and M. Meunier,
Physical Review Letters, 91, 225502-1 - 225502-4, (2003)
Multilayer Si-based surface plasmon resonance structure for absorption sensing,
S. Patskovsky, A. V. Kabashin, M. Meunier and John H.T. Luong,
Analytical Letters, 36(15), 3237-3246 (2003)
Keywords : Surface plamon resonance (SPR), silicon, colloid gold, multi-layer silicon
Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes,
Sergiy Patskovsky, A. V. Kabashin , M. Meunier J. H.T. Luong,
Applied Optics, 42, 6905- 6909 (2003)
The Early Stages of Silicon Surface Damage Induced by Pulsed CO2 Laser Radiation: An AFM Study,
D.-Q. Yang, E. Sacher and M. Meunier,
Applied Surface Science 222, 365-373 (2003)
Keywords : CO2 laser, silicon, surface structure, surface morphology
Properties and Sensing Characteristics of Surface Plasmon Resonance in Infrared Light,
S. Patskovsky, A. V. Kabashin, M. Meunier and J. Luong,
Journal Optical Society America , 20, 1644-1650 (2003)
Fabrication and Characterization of Gold Nanoparticles by Femtosecond Laser Ablation in Aqueous Solution of Cyclodextrins,
A. V. Kabashin, M. Meunier, C. Kingston and J. H.T. Luong,
Journal of Physics and Chemistry B, 107, 4527-4531 (2003)
Laser-induced treatment of silicon in air and formation of Si/SiOx photoluminescent nanostructured layers,
A.V. Kabashin and M. Meunier,
Materials Science and Enginering, B101, 60-64 (2003)
Keywords : Air optical breakdown, laser ablation, nanostructured silicon, photoluminescence
A simple analytical method for the characterization of the melt region of semiconductor under focused laser irradiation,
J.-Y. Degorce, A. Saucier and M. Meunier,
Applied Surface Science, 208, 267-269 (2003),
Keywords : Laser melting, semiconductors, dopant diffusion
Visible photoluminescence from nanostructured Si-based layers produced by air optical breakdown on silicon,
A.V. Kabashin and M. Meunier,
Applied Physics Letters, 82, 1619-1621 (2003)
Laser Tuning Silicon Microdevices for Analogue Microelectronics,
M. Meunier, M. Cadotte and M. Ducharme,
Riken Review, vol 50, 53-57 (2003)
Synthesis of colloidal nanoparticles during femtosecond laser ablation of gold in water,
A.V. Kabashin and M. Meunier,
Journal of Applied Physics, vol 94, no 12 (2003)
Visible photoluminescence from nanostructured Si-based layers produced by air optical breakdown on silicon,
A.V.Kabashin et M.Meunier,
Appl. Phys. Lett.,(2003)
Keywords : photoluminescence, air optical breakdown, silicon nanoparticules
PROCEEDINGS
Processing of metals and semiconductors by a femtosecond laser-based microfabrication system,
M. Meunier, B. Fisette, A. Houle, A.V. Kabashin, S.V. Broude and P. Miller,
Proceeding of the SPIE, 4978, 169-179, (2003)
Keywords : femtosecond laser ablation, laser microfabrication, stainless stell, silicon
Femtosecond laser ablation of gold in aqueous biocompatible solutions to produce colloidal gold nanoparticles,
A.V.Kabashin, M. Meunier and J.H.T. Luong,
Proceedings of the SPIE, Vol 4977, 609-614, (2003)
Keywords : femtosecond laser ablation, gold nanoparticles, aqueous, cyclodextrins
Surface plasmon resonance sensor with silicon-based prism coupling,
S. Patskovsky*, A. V. Kabashin, M. Meunier and J. H.T. Luong,
Proceedings of the SPIE, vol 4958, 144-148 (2003)
Keywords : Surface plasmon resonance, silicon, dispersion, infrared
Modeling electrical characteristics of laser tuned silicon microdevices,
M. Meunier, M. Ducharme and J.-S. Bernier,
Proceedings of SPIE, Vol 4977, 357-361, (2003)
Keywords : Laser trimming, laser tuned microdevices, laser induced diffusible resistance, microelectronics, highly accurate resistance
Porous nanostructured layers on germanium produced by Laser optical breakdown processing,
A. V. Kabashin, V-G. Pilon Marien, D.-Q. Yang, F. Magny and M. Meunier,
Proceedings of SPIE, Vol 4977, 632-638 (2003)
Keywords : air optical breakdown, nanostructure Ge, visible photoluminescence, laser-assisted patterning
Design and fabrication of a microelectrode array dedicated for cortical electrical stimulation,
S. Pigeon, M. Meunier, M. Sawan and S. Martel,
Canadian Conference on Electrical and Computer Engineering, 2003
Proceedings of the IEEE CCECE 2003, Montréal Canada, May 4-7, pp. 813-816 2003
Keywords : Microelectrode, micromachining, neural interface, cortical stimulation, visual prosthetics
2002
PAPERS
Correlation between photoluminescence properties and morphology of laser-ablated Si/SiOx nanostructured films,
A. V. Kabashin, J.-P. Sylvestre, S. Patskovsky, et M. Meunier,
J. Applied Physics, 91, 3248-3254 (2002)
Keywords : photoluminescence, Laser ablation, silicon nanoparticules
A new laser trimming process for microelectronics,
M. Meunier, Y. Gagnon, A. Lacourse, Y. Savaria and M. Cadotte,
Applied Surface Science, 186, 52-56 (2002)
Keywords : laser trimming, microelectronics
Sodium Salt Splitting Performance of a Novel NASICON-polymer Composite Cation Selective Membrane,
L.M. Cormier, F. Ma, S.T. Bah, S. Guétré, M. Meunier, M. Paleologou and A. Yelon,
J. Electrochemical Society, 149, D21-D26 (2002).
Keywords :Sodium salt-splitting, Cation-selective membrane, Ceramic, NASICON
Fabrication of photoluminescent Si-based layers by air optical breakdown near the silicon surface,
A. Kabashin and M. Meunier
Applied Surface Science, 186, (2002)
Keywords : optical breakdown, silicon nanostructures, photoluminescence
PROCEEDINGS
Laser tuning silicon microdevices for analogue microelectronics,
M. Meunier, Y. Gagnon, Y. Savaria et A. Lacourse,
Proceedings of the SPIE, (2002)
Keywords : microelectronics, laser trimming, resistance
Laser induced diffusible resistance: device characterization and process modeling,
M.Meunier, M. Cadotte, M. Ducharme, Y. Gagnon, A. Lacourse,
Proceeding of the SPIE, (2002)
Keywords : Laser trimming, resistance, microelectronics
Silicon-based Surface Plasmon Resonance Biosensor,
S. Patskovsky A. V. Kabashin, M. Meunier, J. H. Luong
in Proceedings of SPIE, CA06-538, (2002).
Keywords : plasmon, biosensor, silicon nanoparticules
Patterning of photoluminescent nanostructured spots on silicon by air optical breakdown processing,
A. V. Kabashin, M. Meunier,
in Proceedings of SPIE, CA05-519, (2002).
Keywords : photoluminescence, silicon nanoparticules, air optical breakdown
Air optical breakdown on silicon as a method of fabrication of photoluminescent Si-based nanostructures,
A.V. Kabashin, M. Meunier,
in Proceedings of SPIE, 4636, (2002).
Keywords : Air optical breakdown, silicon nanoparticules, photoluminescence
Variable porous structure of laser-ablated silicon nanocluster films and its influence on photoluminescence properties,
A.V. Kabashin, J.-P. Sylvestre, S. Patskovsky, et M. Meunier
in Proceedings of SPIE, 4636, (2002).
Keywords : pulsed laser ablation, silicon, nanocluster film, photoluminescence, porosity
Laser induced local modification of silicon microdevices : a new technique for tuning analogue microelectronics,
M. Meunier, M. Ducharme, J.-Y. Degorce, Y. Liao et A. Lacourse,
Proceedings of the SPIE, vol 5147, 316-321 (2003)
Keywords : Laser trimming, laser induced diffusible resistance, microelectronics, highly accurate resistance
2001
PAPERS
Photoluminescence characterization of Si-based nanostructured films produced by pulsed laser ablation in an inert residual gas,
A. V. Kabashin et M. Meunier
J. Vacuum Science and Techn. B19, 2217-2225 (2001).
Keywords : photoluminescence, silicon nanoparticules, pulsed laser ablation, inert residual gas
Focusing method and apparatus for high resolution laser projection pattterning,
D. Popovici et M. Meunier,
Review of Scientific Instruments, 72, 1435-1437, (2001).
Keywords : high-resolution projection patterning, focusing method
Electronic transport by Small Polarons in La0.5Sr0.5MnO3 ,
E. Quenneville, F. Morin, M. Meunier and A. Yelon,
J. Applied Physics, 90 , 1891-1896 (2001).
Keywords : Polarons, Electronic transport, La0.5Sr0.5MnO3
Characterization of La0.5Sr0.5MnO3 thin films prepared by pulsed laser deposition,
P. Decorse, E. Quenneville, M. Meunier, A. Yelon, and F. Morin,
J. Vac. Sci. Technol. A19, 910-916 (2001).
Keywords : pulsed-laser deposition, La0.5Sr0.5MnO3, thin films
The Estimation of the Average Dimensions of Deposited Clusters from XPS Emission Intensity Ratios,
D.Q. Yang, M. Meunier and E. Sacher,
Applied Surface Science, 173, 134-139 (2001).
Keywords : Cluster formation, Metallization
Thermophoretic control of submicron-sized particulate recontamination,
X. Wu, E. Sacher and M. Meunier,
J. Adhesion 75, 341 (2001)
Keywords : Laminar flow, Laser cleaning, Recontamination, Thermophoresis
PROCEEDINGS
Simulation of picosecond pulsed laser ablation of silicon: the molecular-dynamics thermal-annealing model,
P. Lorazo, M. Meunier, et L. Lewis,
Proceedings of the SPIE, Volume 4276, 57-61 (2001)
Keywords : Laser ablation, thermal annealing model, substance superheating effects, molecular dynamics, silicon
A new laser trimming process for microelectronics,
M. Meunier, Y. Gagnon, A. Lacourse, Y. Savaria et M. Cadotte,
Proceedings of the SPIE, Volume 4274, 385-392 (2001)
Keywords : Laser trimming, analogue microelectronics, resistance
2000
PAPERS
Effects of Deposition and Post-fabrication Conditions on Photoluminescent Properties of Nanostructures Si/SiOx Films Prepared by Laser Ablation,
A.V. Kabashin, M. Charbonneau-Lefort, M. Meunier et R. Leonelli,
Applied Surface Science (2000), accepté.
Keywords : Pulsed laser ablation, silicon, silicon nanoparticles, photoluminescence
Picosecond Pulsed Laser Ablation of Silicon : A Molecular – dynamics Study,
P. Lorazo, L.J. Lewis et M. Meunier,
Applied Surface Science 168, 276-279, (2000).
Keywords: Laser ablation, Thermal annealing model, Molecular dynamics, Plume, Ablation threshold, Silicon
Temperature Distribution over a GaAs Heterojunction Bipolar Transistor Measured by Fluorescent Microthermal Imaging,
N. Boyer, B. Oliver, A. Hagley, D.P. Masson, M. Simard-Normandin et M. Meunier,
J. Vac. Sci. Technol. A, 18, 754-756 (2000).
Keywords : Transistor, Microthermal imaging, Temperature distribution
The modeling of excimer laser particle removal from hydrophilic Silicon surfaces, X. Wu, E. Sacher et M. Meunier,
J. Appl. Phys. 87, 3618-3627 (2000).
Keywords : Particle removal, hydrophilic silicon surfaces, excimer laser
PROCEEDINGS
Thermophoretic – Control of submicron – sized particulate recontamination,
X. Wu, E. Sacher et M. Meunier,
Proc. 23rd Ann. Mtg. Adhesion Society, Myrtle Beach, Sc, Feb 20-23, 2000, 15510 1086-9506, p. 360-362.
Keywords :
Production of Photoluminescent Si-based Nanostructures by Laser Ablation : Effects of the Ablation and Post-deposition Conditions,
A.V. Kabashin, M. Charbonneau-Lefort, M. Meunier et R. Leonelli,
SPIE Proceedings, Vol. 3933, pp.192-199 (2000).
Keywords : pulsed laser ablation, silicon nanoparticles, photoluminescence
Excimer Laser Cleaning for Microelectronics : Modeling, Applications and Challenges,
M. Meunier, X. Wu, F. Beaudoin, E. Sacher,
SPIE Proc. Article invite, Vol. 3618, 290-301 (2000).
Keywords :
Molecular Dynamics of picosecond Pulsed Laser Ablation and Desorption of Silicon,
P. Lorazo, L. Lewis et M. Meunier,
SPIE Proc. Vol. 3935, 66-75 (2000).
1999
PAPERS
The effects of hydrogen bonds on the adhesion of inorganic oxide particles on hydrophilic Silicon surfaces,
X. Wu, E. Sacher et M. Meunier,
J. Appl. Physics, 86, 1744-1748 (1999).
Keywords :
Evaluation of a ceramic-polymer composite cation-selective membrane for sodium salt splitting,
F. Girard, R. Izquierdo, E. Quenneville, M. Paleologou, M. Meunier, D. Ivanov et A. Yelon,
Electrochemical Society, 146, 2919-2924 (1999).
Keywords : Sodium salt-splitting, Cation-selective membrane, Ceramic
Laser-enhanced gas phase surface modifications of Teflon AF1600 for increased Copper adhesion,
D. Popovici, M. Meunier et E. Sacher,
J. Adhesion, 70, 155-165 (1999).
Keywords : Adhesion, copper, fluoropolymer, excimer laser, X-ray damage
Excimer laser induced removal of particles from hydrophilic Silicon surfaces,
X. Wu, E. Sacher et M. Meunier,
J. Adhesion, 70, 167-178 (1999).
Keywords :
Electrical Properties of Annealed La0.5Sr0.5MnO3 Thin Films Prepared by Pulse Laser Deposition,
E. Quenneville, P. Decorse, M. Meunier, F. Morin and A., Yelon,
Electro Chem. Soc. Proc. 99-13, 218-227 (1999).
Keywords : Pulser laser deposition, thin films, lanthanum manganite, conductivity measurements
Novel Nasicon-Polymer Composite Membrane for Electrically Driven Processes. Effect of Ceramic thickness on Current Efficiency,
L. Cormier, F. Ma, S.T. Bah, S. Guétré, M. Meunier, M. Paleologou, and A. Yelon,
Electrochem. Soc. Proc. 99-13, 35-41 (1999).
Keywords : NASICON, Ceramic, Electrically driven processes, Current Efficiency
PROCEEDINGS
FMI applied to the study of the temperature distribution in flip chips,
N. Boyer, D. P. Masson, M. Meunier, M. Simard-Normandin,
Procedings of the Semi-Therm. XV Conf. (1999).
Keywords : fluorescent microthermal imaging, temperature distribution, microelectronics
1998
PAPERS
Pulsed laser deposition of superionic thin films: deposition and applications in electrochemistry,
M.Meunier, R. Izquierdo, L. Hasnaoui, E. Quenneville, D. Ivanov, F. Girard, F. Morin, A. Yelon, et M. Paleologou,
Appl. Surf. Science, 127-129, 466-470 (1998).
Keywords : Pulsed laser deposition, Ceramic thin films, Na superionic conductor
Excimer laser cleaning of silicon wafer backside metallic particles,
F. Beaudoin, M. Meunier, M. Simard-Normandin et D. Landheer,
J. Vac. Science and Technol. A16, 1976-1979 (1998).
Keywords : laser cleaning, Silicon, contamination, adhesion, Excimer laser
Photodegradation of Teflon AF1600 During XPS Analysis,
D. Popovici, E. Sacher et M. Meunier,
J. Appl. Polymer. Sci., 70, 1201-1207 (1998).
Keywords : fluoropolymer, Teflon AF, X-ray photoelectron spectroscopy, photodegradation, mass spectroscopy
Laser-Induced Metalorganic Chemical Vapor Deposition of Cu(hfac)(TMVS) on Amorphous Teflon AF1600: An XPS Study of the Interface,
D. Popovici, G. Czeremuzkin, E. Sacher et M. Meunier,
Appl. Surf. Sci., 126, 198-204 (1998).
Keywords : Laser-induced metal-organic chemical vapour deposition (MOCVD), Amorphous Teflon AF1600, XPS study
Angle-resolved XPS comparison of Cu-Teflon AF1600 and Al-Kapton metal diffusion,
D. Popovici, K. Piyakis, M. Meunier et E. Sacher,
J. Appl. Phys., 83, 108-111 (1998).
Keywords : XPS, Teflon AF1600
Laser cleaning for microelectronics,
M. Meunier, S. Boughaba, X. Wu, F. Beaudoin, E. Sacher et M. Simard Normandin, Proceedings of the 5th international ACS Congress of North America, Symposium 627 Industrial Cleaning without CFCs, (1998).
Keywords :
Metallic contamination from wafer handling,
F. Beaudoin, M. Simard-Normandin et M. Meunier,
ASTM STP 1340, éditeur D.C. Gupta, Bacher et W.H. Hughes, (1998).
Keywords : Microcontamination, Metallic contamination, iron contamination, particle contamination, surface photovoltage, wafer handling
Metallic contamination from particles on the back-sides of wafers,
M. Simard-Normandin, F. Beaudoin et M. Meunier,
Symposium on particles on surfaces: Detection, Adhesion, Removal
In Particles and Surfaces 5 and 6, Detection, Adhesion and Removal, pp 35-45, ed K.L. Mittal, (1999)
Keywords : microcontamination, metallic contamination, iron contamination, particle contamination, surface photovoltage, wafer handling
PROCEEDINGS
Surface Modification of Teflon AF1600 for Enhanced Adhesion,
D. Popovici, M. Meunier et E. Sacher,
Proc. 21st Annu. Mtg. Adhesion Society, 1998, p. 77.
Keywords :
Excimer Laser-Induced Removal of Particles from Silicon Surfaces: Effects of Photoacoustic Waves,
X. Wu, M. Meunier et E. Sacher,
Proc. 21st Annu. Mtg. Adhesion Society, 1998, P. 309.
Keywords : Photoacoustic waves, Excimer laser, Silicon surface, Laser-induced removal of particles
1997
PAPERS
Are Defect-Tolerant Circuits with Redundancy Really Cost-Effective? Complete and Realistic Cost Model,
Y. Gagnon, M. Meunier, Y. Savaria, et C. Thibeault,
J. of Microelectr. Syst. Integration, 5, 199-208 (1997).
Keywords : Cost model, redundancy, fault-tolerance, multi-processors
Pulsed laser deposition of NASICON for the fabrication of Ion selective membranes,
R. Izquierdo, E. Quenneville, F. Girard, M. Meunier, D. Ivanov, M. Paleologou et A. Yelon,
J. of Electrochemical Soc., 144, L323-L325 (1997).
Keywords :
La métallisation de Polymères: Cuivre sur les Fluoropolymères,
E. Sacher, L. Martinu, et M. Meunier,
J. Phys. (Paris), déc. 1, C6 239 248 (1997).
Keywords : Metallization, fluoropolymers, evaporation, sputtering, Teflon
Laser chemical vapor deposition of W Schottky contacts on GaAs using WF6 and SiH4,
M. Tabbal, M. Meunier, R. Izquierdo, B. Beau et A. Yelon,
J. Appl. Phys., 81, 6607 6611 (1997).
Keywords : Laser-chemical vapor deposition, Schottky contacts,
Laser induced deposition of tungsten and copper,
M. Meunier, R. Izquierdo, M. Tabbal, S. Evoy, P. Desjardins, M.H. Bernier, J. Bertomeu, N.El Yaagoubi, M. Suys, E. Sacher et A. Yelon,
Mat. Science and Eng., B, 45, 200-207 (1997).
Keywords : Copper, GaAs, In situ processing, Laser microsurgery, Laser processing, Microelectronics, Packaging, Silicon, Tungsten
Copper metallization of TEFLON AF1600 using evaporation and sputtering for multilevel interconnect devices,
D. Popovici, J.E. Klemberg-Sapieha, G. Czeremuszkin, E. Sacher, M. Meunier and L. Martinu,
Microelectronic Engineering, 33, 217-222 (1997).
Keywords : Microelectronics, Copper metallization, Teflon AF1600, evaporation, sputtering
Excimer laser treatment of NiTi shape memory alloy biomaterials,
F. Villermaux, M. Tabrizian, L.H. Yahia, M. Meunier and P.L. Piron,
Appl. Surf. Science, 109-110, 62 (1997).
Keywords : NiTi shape memory alloy, Laser surface treatment, Corrosion resistance, Biomaterials
Laser micromachining of free-standing structure in SiO2-covered silicon,
M. Allard, S. Boughaba et M. Meunier,
Appl. Surf. Science, 109-110, 189 (1997).
Keywords : Laser micromachining, Silicon
Surface characterization of excimer laser induced deposition of W on GaAs from WF6 and H2,
M. Tabbal, R. Izquierdo, M. Meunier, C. Pépin et A. Yelon,
Appl.Surf.Sci., 108, 417-424 (1997).
Keywords : Laser induced deposition, X-Ray photoelectron spectroscopy
Liquid Explosive Evaporative Removal of Submicron Particles From Hydrophilic Oxidized Si Surfaces,
S. Boughaba, X. Wu, E. Sacher et M. Meunier,
J. Adhesion, 61, 293-301 (1997).
Keywords : Laser cleaning, liquid explosive evaporation, particle removal, adhesion, contamination, hydrophilic silicon surface
Plasma Surface Modification of Fluoropolymer Studied in TOF-SIMS,
D. Léonard, P. Bertrand, M.K. Shi, E. Sacher, L. Martinu et M. Meunier, Electrochem. Abstracts, 97-1, 311 (1997).
Keywords :
Thermal Stability of Low Permittivity Fluoropolymer Dielectrics,
G. Czeremuszkin, L. Martinu. A. Alptekin, D. Popovici, M. Meunier et E. Sacher, Electrochemical Society Meeting Abstracts, 97-1, 312 (1997).
Keywords :
Mechanical and Dielectric Properties of Low-Permittivity Dielectric Materials,
A. Alptekin, G. Czeremuszkin, L. Martinu, M. Meunier, E. Sacher and M. DiRenzo,
in "Low Dielectric Constant MaterialsII", édité par A. Lagendijk, H. Treichel, K.J. Uram et A.C. Jones, MRS Symposium Proceedings, 443, 79-84 (1997).
Keywords : low permittivity dielectric, Teflon AF1600, fluoropolymers
1996
PAPERS
CO2 laser-assisted removal of submicron particles from solid surfaces,
J.B. Héroux, S. Boughaba, I. Ressejac, E. Sacher et M. Meunier,
Journal of Applied Physics, 79, 2857-2862 (1996).
Keywords : CO2 laser, particle removal, adhesion, contamination
Laser micro-machining of silicon three-dimensional structures, tunnels, and cavities,
B. Shen, M. Allard, S. Boughaba, R. Izquierdo et M. Meunier,
Journal of Canadian Physics, 74, 557-561 (1996).
Keywords : Laser micromachining, Silicon, , tunnels, cavities
CO2 laser-assisted particle removal from silicon surface,
J.B. Héroux, S. Boughaba, E. Sacher et M. Meunier,
Canadian Journal of Physics, 74, 5685-5689 (1996).
Keywords : CO2 laser, particle removal, Silicon, adhesion, contamination
Pulsed laser deposition of NASICON thin films,
R. Izquierdo, F. Hanus, T. Lang, D. Ivanov, M. Meunier, L. Laude, J.F. Currie, A. Yelon,
Appl. Surf. Science, 96-98, 855-858 (1996).
Keywords : Pulsed laser deposition, NASICON, thin films
The Deposition of Copper onto Teflon AF1600: an XPS Comparison of Vapor Deposition and Sputtering,
D. Popovici, J.E. Klemberg-Sapieha, G. Czeremuskin, A. Alptekin, L. Martinu, M. Meunier et E. Sacher,
Metallized Plastics V, (1996), édité par K.L. Mittal, VSP, Zeist, NL, p. 237-253 (1998)
Keywords : vapor deposition, Teflon AF1600, XPS, Sputtering
The Spontaneous Reaction of Cu(hfac)(TMVS) Vapor with DuPont Teflon AF1600,
D. Popovici, E. Sacher, M. Meunier, D. Léonard et P. Bertrand,
Metallized Plastics V, (1996), édité par K.L. Mittal, VSP, Zeist, NL, p. 254-260 (1998)
Keywords : Teflon AF1600, Spontaneous reaction
1995
PAPERS
Diode laser-assisted pyrolysis of organometallic films for the fabrication of metallic conductors on polyimide,
S. Evoy, R. Izquierdo, M.-H. Bernier, M. Meunier et E. Sacher,
IEEE Components, Packaging and Manufacturing Technology, 18, 697-703 (1995).
Keywords : Diode laser, interconnects, copper, packaging, electroless, organometallic
Caractérisation structurale de couches minces de silicium polycristallin fabriquées par dépôt chimique en phase vapeur sous basse pression du SiH4 et dopées en phosphore in-situ,
G. Béïque, M. Caron, J.F. Currie et M. Meunier,
Can. J. Phys. 73, 526-529 (1995).
Keywords : vapor deposition, thin films, Polysilicon
Excimer laser-induced deposition of copper from Cu(hfac) (TMVS),
R. Izquierdo, J. Bertomeu, M. Suys, E. Sacher and M. Meunier,
Appl. Surf. Science, 86, 509-513 (1995).
Keywords : Excimer laser-induced deposition, fluoropolymers, copper films
Laser Processing of Tungsten and its Silicides from WF6 and SiH4,
M. Meunier, M. Tabbal, N. El Yaagoubi, P. Desjardins, R. Izquierdo and A. Yelon,
article invité, Appl.Surf.Sci.,86,475-483 (1995).
Keywords : Laser-induced deposition
1994
PAPERS
Excimer Laser-Induced Metallization for in situ Processing on Si and GaAs,
M. Meunier, M. Suys, M. Tabbal, R. Izquierdo, A. Yelon et E.Sacher,
Appl.Surf.Science, 79/80, 208-214 (1994).
Keywords : Excimer laser-induced metallization, in situ processing
Excimer Laser for in situ Processing in Microelectronics,
M. Meunier, P. Desjardins, R. Izquierdo, M. Tabbal et M. Suys,
article invité dans "Excimer Lasers", édité par L.D.Laude, NATO Adv. Study Inst., Vol. 265, 319-338 (1994).
Keywords : Microelectronics, in situ processing, excimer laser
PROCEEDINGS
Myocardial Impedance Measurements with a Modified Four Electrode Technique,
P. LeGuyader, P. Savard, R. Guardo, L. Pouliot, F. Trelles et M. Meunier,
Proc. 16th IEEE (1994).
Keywords : Myocardial impedance, four electrode technique
Laser Induced Deposition of Tungsten and Copper ,
M. Meunier, R. Izquierdo, M. Tabbal, J. Bertomeu, N. El Yaagoubi, M. Suys, E. Sacher et A. Yelon,
article invité dans Proc. Of Engineering Foundation Conf. on Processing and Advanced Applications of Lasers, (1994).
Keywords :
Diode Laser-Assisted Deposition of Gold and Copper from Thin Organometallic Films,
S.Evoy, M.-H.Bernier, R.Izquierdo, F.Pieri, M. Meunier et E.Sacher,
Proc.MRS Boston,323,91-96 (1994).
Keywords : diode laser-assisted process, spin-coating, organometallic, gold, copper
Excimer Laser Chemical Vapor Deposition of Copper from Cu(hfac)(TMVS),
M. Suys, R. Izquierdo, E. Sacher et M. Meunier,
dans Advanced Metallization for ULSI, 63 69 (1994).
Keywords : Excimer laser chemical vapor decomposition, Copper
Laser Processing of Palladium for Selective Electroless Copper Plating,
M.-H. Bernier, R. Izquierdo et M. Meunier,
dans Laser-assisted fabrication of thin films and microstructures, SPIE Proceeding Vol. 2045, 330-337 (1994).
Keywords : Palladium, selective electroless, Laser-assisted activation, laser-induced decomposition
Laser Fabrication of Three-Dimensional Microstructures, Cavities and Columns,
B. Shen, R. Izquierdo et M. Meunier,
dans Laser-assisted fabrication of thin films and microstructures, SPIE Proceeding Vol. 2045, 91-98 (1994).
Keywords : three-dimensional microstructures, laser processing, cavities, tunnels
Diode Laser-Induced Decomposition of Spin-Coated Organometallic Thin Films,
S. Evoy, M.-H. Bernier, P. Desjardins, R. Izquierdo, M. Meunier et E. Sacher,
ans Laser-assisted fabrication of thin films and microstructures, SPIE Proceeding Vol. 2045, 63-71 (1994).
Keywords : diode, organometallic, pyrolitic decomposition, spin-coating
Excimer Laser-Induced Metallization for Si and GaAs Microelectronics,
M. Meunier, M. Tabbal, M. Suys, R. Izquierdo, A. Yelon, E. Sacher, S. Poulin,
dans Laser-assisted fabrication of thin films and microstructures, SPIE Proceeding Vol. 2045, 84-90 (1994).
Keywords : Metallization, microelectronics, Schottky contacts, Excimer laser-induced deposition
1993
PAPERS
Diode Laser Induced Chemical Vapor Deposition of WSix on TiN from WF6 and SiH4,
P. Desjardins, R. Izquierdo et M. Meunier,
J. Appl. Phys., 52 (10), 5216-5221 (1993).
Keywords : Diode, chemical vapor deposition, TiN
Laser Induced Deposition of Tungsten on GaAs from WF6,
A. Lecours, R. Izquierdo, M. Tabbal, M. Meunier et A. Yelon,
J. Vacuum Science and Technology B11, 51-54 (1993).
Keywords : Laser induced deposition, tungsten
Blueshift of the Optical band gap: Implications for the Quantum Confinement Effect in a-Si:H/a-SiNx:H Multilayers,
M. Beaudoin, M. Meunier et C.J. Arsenault,
Phys. Rev. B47, 2197 (1993).
Keywords : Optical band gap, blueshift, Quantum confinement effect, multilayer structures
PROCEEDINGS
Surface Interaction Between WF6 and GaAs Under UV Laser Illumination,
M. Tabbal, R. Izquierdo, M. Meunier et A. Yelon,
Proceedings MRS-Boston, 282, 191-196 (1993).
Keywords :laser-CVD, photoelectron spectroscopy, pyrolitic dissociation
Laser-Assisted Low Temperature Deposition of WSix from WF6 and SiH4,
R. Izquierdo, P. Desjardins, N. El Yaagoubi et M. Meunier,
Proceedings of MRS-Boston, 282, 209-214 (1993).
Keywords : low temperature deposition, laser direct writing
The Reduction of CuII Compounds by Excimer Laser Irradiation for Copper Metal Deposition,
M. Suys, B. Moffat, M.-H. Bernier, R. Izquierdo, S. Poulin, M. Meunier et E. Sacher, Proceedings of MRS-Boston, 282, 179-185 (1993).
Keywords : Excimer laser, Copper metal deposition, reduction of CuII compounds
1992
PAPERS
Interfaces et queux d'Urbach des multicouches de a-Si:H/a-Si:Nx:H,
M. Beaudoin, M. Meunier, R. Muschick, R. Schwarz, C.J. Arsenault, M. Beaulieu, O. Grimal et F. Wang,
J. Can. Phys 70, 824-829 (1992).
Keywords : glow discharge multilayer structures, amorphous silicon, Urbach slope, effective interfaces
Dépôt laser de WSix sur TiN à partir de WF6 et SiH4,
P. Desjardins, R. Izquierdo et M. Meunier,
J. Can. Phys 70, 898-903 (1992).
Keywords : laser-induced deposition, direct writing
Variation de la contrainte des verres de silice sous cycle thermique,
H. Bouchard, A. Azelmad, J.F. Currie et M. Meunier,
J. Can. Phys 70, 830-833 (1992).
Keywords : stress, annealing temperature, LPCVD, phosphosilicate glass
Electron and Hole
F. Wang, R. Schwarz, M. Beaudoin et M. Meunier,
Superlattices and Microstructures 12, 549-552 (1992).
Keywords :
Laser direct writing of Tungsten from WF6,
M. Meunier, A. Lecours, R. Izquierdo, P. Desjardins, M. Tabbal et A. Yelon,
Article invité Thin Solid Films, 218, 137-143 (1992).
Keywords : laser direct writing, tungsten
Modelling KrF Excimer Laser Induced Deposition of Titanium from Titanium Tetrachloride,
M. Meunier, C. Lavoie, S. Boivin, R. Izquierdo et P. Desjardins,
Appl. Surf. Sc., 54, 52-55 (1992).
Keywords : excimer laser induced deposition, titanium, growth regimes
Laser-Induced Damage Formation and Tungsten Deposition on GaAs,
A. Lecours, M. Meunier et R. Izquierdo,
Applied Surface Science, 54, 60-63 (1992).
Keywords : Laser-induced damage formation, tungsten deposition
PROCEEDINGS
Diode Laser Induced CVD of WSix from WF6 and SiH4,
P. Desjardins, R. Izquierdo et M. Meunier,
Proceedings of MRS, Boston, 3-6 déc., Vol. 236, pp. 127-132, (1992).
Keywords : Diode, chemical vapor deposition, laser direct writing
Laser CVD of Tungsten on Silicon Oxynitride,
R. Izquierdo, A. Lecours et M. Meunier,
Proceedings of MRS, Boston, 3-6 déc., Vol. 236, pp 111-116, (1992).
Keywords : CVD, laser direct writing, Silicon oxynitride
Surface Studies of Laser Processing of W on GaAs from WF6,
M. Tabbal, A. Lecours, M. Meunier et A. Yelon,
Proceedings of MRS, Boston, 3-6 déc., Vol. 236, pp. 117-122, (1992).
Keywords : Laser Chemical Vapor Deposition, tungsten, surface studies
1991
PAPERS
Perpendicular Transport in a-Si:H/a-SiNx:H Single and Double Barrier Structures,
C. J. Arsenault, M. Meunier, M. Beaudoin et B. Movaghar,
Phys. Review B 44, Rapid Communication, 11 521-11 524 (1991).
Keywords : Electronic transport, perpendicular transport, amorphous semiconductor, current bump
On the Blue-Shift of the Optical Bandgap of a-Si:H/a-SiNx:H Multilayer,
M. Beaudoin, C. J. Arsenault et M. Meunier,
J. Non-Cryst. Solids, 137-138, 1099-1102 (1991).
Keywords : Multilayer structures, blue-shift, optical bandgap
Electronic Transport Through a-Si:H/a-SiNx:H Single and Double Structures,
C. J. Arsenault, M. Meunier, M. Beaudoin et B. Movaghar,
J. Non-Cryst. Solids, 137-138, 1111-1114 (1991).
Keywords : Electronic transport, amorphous semiconductor, perpendicular transport, current bump
Profile of Titanium Lines Produced by Laser Direct Writing on Lithium Niobate,
C. Lavoie, M. Meunier, S. Boivin, R. Izquierdo et P. Desjardins,
Journal of Applied Physics 70, 2343-2347 (1991).
Keywords : titanium lines, laser direct writing, excimer laser
Laser Area Excimer Laser Induced Deposition of Titanium from TiCl4,
C. Lavoie, M. Meunier, R. Izquierdo, S. Boivin et P. Desjardins,
Applied Physics A53, 339-342 (1991).
Keywords : Large area excimer laser, process modeling, growth regimes
PROCEEDINGS
KrF Excimer Laser Direct Writing of Titanium lines: Modeling and Application to the Fabrication of Ti:LiNbO3 Waveguides,
M. Meunier, C. Lavoie, R. Izquierdo, S. Boivin et P. Desjardins,
Proceedings of the MRS, Vol. 201, Boston, 24 30 nov. (1990), 625-630 (1991).
Keywords : Laser direct writing, excimer laser, titanium lines, waveguides
1990
PAPERS
High Field Transport in Disordered Materials,
B. Movaghar, A. Yelon et M. Meunier,
Chem. Phys., 146, 389-408 (1990).
Keywords : high field transport, disordered materials, density of states effect
Excimer Laser Direct Writing of Titanium Lines on Lithium Niobate,
R. Izquierdo, C. Lavoie et M. Meunier,
Appl. Phys. Lett. 57 (7), 647 649 (1990).
Keywords : Excimer laser, laser direct writing, titanium lines, growth regimes
Defining Micron Scale Platinum Contacts on Hydrogenated Amorphous Silicon,
A. Lecours, M. Meunier et M. Bisson,
J. Vac. Sci. and Technology B8, 109 110 (1990).
Keywords : Amorphous Silicon, Micromachining, platinium contacts
PROCEEDINGS
KrF Excimer Laser Deposition of Titanium from TicCl4,
R. Izquierdo, M. Meunier et C. Lavoie,
Proceedings of the MRS, Boston, 27 nov. 2 déc. 1989, MRS Vol. 158, 141 146 (1990).
Keywords : titanium lines, excimer laser, growth regimes
1989
PAPERS
Interface Study of Hydrogenated Amorphous Silicon Nitride on Hydrogenated Amorphous Silicon by X Ray Photoelectron Spectroscopy,
M. Beaudoin, C. J. Arsenault, R. Izquierdo et M. Meunier,
Appl. Phys. Lett. 55, 2640 2642 (1989).
Keywords : Interface study, amorphous silicon, x-ray spectroscopy
Amorphous Silicon Static Induction Transistor,
M. Meunier, M. Bisson et M. Kemp,
J. Non Cryst. Solids, 115, 108 110 (1989).
Keywords : Amorphous silicon, transistor, microelectronics
Proposed New Resonant Tunneling Structures with Impurity Planes of Deep Levels in Barriers,
C. J. Arsenault et M. Meunier,
J. Appl. Phys. 66, 4305 4311 (1989)
Keywords : resonant tunnelling structures, impurity planes of deep levels (IPDL)
Fabrication and Characterization of the Amorphous Silicon Static Induction Transistor,
M. Bisson, M. Kemp et M. Meunier,
IEEE Trans. on Elect. Devices, ED 36, 2844 2847 (1989).
Keywords : Amorphous silicon, transistor, microelectronics
Resonant Tunneling Lifetime Comparison Between Double Barrier and d Doped Barrier Structures,
C. J. Arsenault et M. Meunier,
Phys.Rev.B39, 8739 8742(1989).
Keywords :
CF4/Ar Reactive Ion Etching of Gallium Arsenide,
P. Lussier, M. Bélanger, M. Meunier et J. F. Currie,
J. Can. Phys. 67, 259 261 (1989).
Keywords : reactive ion etching, diode, Schottky barrier
Simulation of the Amorphous Silicon Static Induction Transistor,
M. Kemp, M. Meunier, C. G. Tannous,
Solid State Electronics 32, 149 157 (1989).
Keywords : amorphous silicon, transistor, microelectronics
Amorphous Silicon Static Induction Transistor,
M. Meunier, M. Bisson et M. Kemp,
APS March Meeting (1989). Bull. of the American Physical Society 34, No. 3, p. 466 (1989).
Keywords :
Proposed New Resonant Tunneling Structures with d Doped Barriers,
C. J. Arsenault et M. Meunier,
APS March Meeting 1989. Bull. of the Amer. Phys. Society 34, No. 3, p. 779 (1989).
Keywords :
1988
PAPERS
Amorphous Silicon Device Simulation by an adapted Gummel method,
M. Kemp, C. G. Tannous et M. Meunier,
IEEE Transaction on Electron Devices. 35, 1510-1513(1988).
Keywords : amorphous silicon, Gummel method, charge carriers,
PROCEEDINGS
Integrated Optics and Optelectronics at Ecole Polytechnique de Montréal,
I. Najafi, J. F. Currie, R. Maciejko, M. Meunier et R. Masut,
Proceeding of the Can. Conference on Electrical and Computer Eng., pages 667 669 (1988).
Keywords :
Amorphous Silicon Static Induction Transistor: Simulation and Fabrication Development,
M. Meunier, M. Kemp et M. Bisson,
Proceeding of the Int. Conference on Amorphous Silicon Devices, IBM Yorktown Heights, N.Y., pages 204 207 (1988).
Keywords :
Amorphous Silicon Static Induction Transistor,
M. Bisson, M. Kemp et M. Meunier,
Proceeding of the Fourth Can. Conference on Semiconductor Technology, Ottawa, p. 78 (1988).
Keywords :
Amorphous Silicon Resonant Tunneling Devices,
C. J. Arsenault et M. Meunier,
Proceeding of the Fourth Can. Conference on Semiconductor Technology, Ottawa, p. 103 (1988).
Keywords :
Effet tunnel résonant avec double barrière amorphe,
C. J. Arsenault et M. Meunier,
ACFAS, 9 13 mai 1988, Annales de l'ACFAS, 56, 158 (1988).
Keywords :
Resonant Tunneling through Amorphous Semiconductor Double Barrier Structures,
C. J. Arsenault et M. Meunier,
Conf. de l'Association Canadienne des Physiciens, 21 23 juin 1988, Bull. of the American Physical Society, 33, No. 5, p. 1237, (mai 1988).
Keywords :
1987
PAPERS
Laser induced chemical vapor deposition of hydrogenated amorphous silicon I: gas phase process model,
M. Meunier, J.H. Flint, J.S. Haggerty et D. Adler,
J. Appl. Phys. 62, 2812-2821, (1987).
Keywords : Laser induced CVD, Amorphous Silicon
Laser induced chemical vapor deposition of hydrogenated amourphous silicon II : film properties,
M. Meunier, J.H. Flint, J.S. Haggerty et D. Adler,
J. Appl. Phys. 62, 2822-2829 (1987).
Keywords : laser-induced CVD, amorphous silicon
1986
PROCEEDINGS
Amorphous Silicon Static Induction Transistors,
G.H. Harling, M. Meunier et J.F. Currie,
Proceeding of the Third Canadian Confce on Semiconductor Technology, Ottawa (1986)
Keywords :
1985
PROCEEDINGS
Hydrogenated Amorphous Silicon prepared by Laser-Induced Chemical Vapor Deposition of Silane for Solar-Cell Applications,
H.M. Branz, M. Meunier, S. Fan, J.H. Flint, J.S. Haggerty et D. Adler,
Proceeding of the 18th IEEE Photovoltaic Scelialists Conference, NY (1985), pp. 513-518.
Keywords :
In Situ Infrared Spectroscopy of Electric Field Induced Microstructural Changes In Polyethylene,
M. Meunier et J.P. Crine,
Annual Report, Conference on Electrical Insulation and Dielectric Phenomena, IEEE, NY, (1985), pp. 377-382.
Keywords :
1984
PAPERS
Properties of Hydrogenated Amorphous Silicon Films Produced by Laser Induced CVD,
M. Meunier, J.H. Flint, D. Adler, J.S. Haggerty, L.V. Atkins, C.J. Petti et E. Wong,
in Laser Chemical Processing of Semiconductor Devices, ed. F.A. Houle, T.F. Deutsch et R.M. Osgood, Materials Research Society Symposia, Pittsburgh, (1984), pp. 24-26.
Keywords :
PROCEEDINGS
a-Si :H films produced from laser heated gases: process characteristics and film properties,
J.H. Flint, M. Meunier, D. Adler et J.S. Haggerty,
in Proceedings of SPIE, the International Soiety for Optical Engineering in Laser Assisted Deposition, Etching and Doping (Bellingham, WA) 459. (1984) 66-70.
Keywords : laser heated gases, growth regimes
Process Model of laser induced chemical vapor deposition of hydrogenated amorphous silicon,
M. Meunier, J.H. Flint, D.Adler et J.S. Haggerty, “ Materials Research Society Proceedings Lasers-Controlled Chemical Processing of Surfaces, 29. (1984), 394-399.
Keywords :
1983
PAPERS
Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane,
M. Meunier, J.H. Flint, D. Adler et J.S. Haggerty,
J. Non-Cryst. Solids, 59-60, 699-702 (1983).
Keywords : CVD, growth regimes, amorphous silicon
Electrical properties of biotite micas,
M. Meunier, J.F. Currie, M.R. Wertheimer et A. Yelon,
J. Appl. Phys. 54, (1983), 898-905.
Keywords : biotite micas, electrical conduction, chemical deposition
Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane,
M. Meunier, T.R. Gattuso, D. Adler et J.S. Haggerty,
Appl. Phys. Lett. 43, 273-275 (1983).
Keywords : amorphous silicon, laser induced CVD, Electrical conductivity
PROCEEDINGS
Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane,
M. Meunier, J.H. Flint, D.Adler et J.S. Haggerty,
Proceedings of the 10th International Conference on Amorphous and Liquid Semiconductors, Tokyo, 59-60, (1983), 699-702.
Keywords :
IR Lase-induced deposition of silicon thin films,
T.R. Gattuso, M. Meunier, D. Adler et J.S. Haggerty,
Laser Diagnostics and Photo-chemical Processing for Semiconductor Devices, 17, (1983), 215-222.
Keywords : laser-induced pyrolysis, Electrical conductivity, amorphous semiconductor, thin films
1982
1981
PAPERS
Activation energies from conductivity-temperature measurements,
M. Meunier, J.F. Currie, M.R. Wertheimer et A. Yelon,
J. Non-Cryst. Solids, 46, (1981), 433-436
Keywords : Activation energies, conductivity measurements
1980
1979
PAPERS
Some distortions in quadrupole fields and their relation to mass filter performance,
P.H. Dawson et M. Meunier,
International Journal of Mass Spectrometry and Ion Physics 29, 269-299 (1979)
Keywords : quadrupole fields, mass filter